Mechano-Microprocess Cleanroom
Map & Directions
Institute of Science Tokyo, Yokohama Campus
≪Yokohama Campus≫
Yokohama Campus is a 5-minute walk from Suzukakedai Station on the Tokyu Denentoshi Line.
＜Semiconductors and MEMS Processing Division＞
Bldg. R2-A, 2F, Room 203
<Mechano-Microprocess Cleanroom>
Bldg. R3-D(COE), 3F
301 ：Mechano-Microprocess Cleanroom 1
306 ：Mechano-Microprocess Cleanroom ２
SCIENCE TOKYO
Yokohama Campus
Semiconductors and MEMS Processing Division. Ext. 5074
Mechano-Microprocess Cleanroom 1 Ext, 5863
Mechano-Microprocess Cleanroom 2 Ext. 5860
EN / JP