Mechano-Microprocess Cleanroom

Map & Directions

Tokyo Institute of Technology, Suzukakedai Campus




≪Suzukakedai Campus≫
 Suzukakedai Campus is a 5-minute walk from Suzukakedai Station on the Tokyu Denentoshi Line.


  <Semiconductors and MEMS Processing Division>
 Bldg. R2-A, 2F, Room 203

  <Mechano-Microprocess Cleanroom>
 Bldg. R3-D(COE), 3F
   301 :Mechano-Microprocess Cleanroom 1
   306 :Mechano-Microprocess Cleanroom 2

SCIENCE TOKYO
Suzukakedai Campus

Semiconductors and MEMS Processing Division. Ext. 5074

Mechano-Microprocess Cleanroom 1 Ext, 5863

Mechano-Microprocess Cleanroom 2 Ext. 5860


EN / JP