Tokyo Institute of Technology
Operated by Semiconductors and MEMS Processing Division, Open Facility Center
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Tokyo Institute of Technology
Suzukakedai Campus丂丂
Semiconductors and MEMS Processing Division. Ext. 5074
Mechano-Microprocess Cleanroom 1 Ext, 5863
Mechano-Microprocess Cleanroom 2 Ext. 5860
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