Tokyo Institute of Technology

　Laboratory for Future Interdisciplinary Research of Science and Technology (FIRST)
　http://www.first.iir.titech.ac.jp/

　Open Facility Center(OFC)
　https://www.ofc.titech.ac.jp/

　Semiconductors and MEMS Processing Division, Open Facility Center
　https://www.ofc.titech.ac.jp/~semimem/

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