SCIENCE　TOKYO

　Laboratory for Future Interdisciplinary Research of Science and Technology (FIRST)
　http://www.first.iir.titech.ac.jp/

　Core Facility Center(CFC)
　https://www.ofc.titech.ac.jp/

　Semiconductors and MEMS Processing Division, Core Facility Center
　https://www.ofc.titech.ac.jp/division/semimem/

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