Address
@§226-8503
@R2-3, 4259 Nagatsuta-cho, Midori-ku, Yokohama, Kanagawa 226-8503 Japan
Tel/Fax
@045-924-5074
Mail
@semi-mem"at"ofc.titech.ac.jp
Please replace "at" with @ and send the e-mail.
Semiconductors and MEMS Processing Division. Ext. 5074
Mechano-Microprocess Cleanroom 1 Ext, 5863
Mechano-Microprocess Cleanroom 2 Ext. 5860