Mechano-Microprocess Cleanroom 1 & 2

　The 3rd floor of Creative Research Laboratory (R3-D Building) in Suzukakedai Campus has Mechano-Microprocess Cleanroom1 and 2, which are the Future Interdisciplinary Research of Science and Technology (FIRST)’s cleanrooms. The former one is 100m² ISO 6, and the latter one is 90m² ISO 7.

These cleanrooms are equipped with a series of equipment necessary for microfabrication. The management and operation of cleanrooms and equipment are outsourced to Semiconductors and MEMS Processing Division, Open Facility Center. Applicants inside and outside the Tokyo Institute of Technology are allowed to use the equipment under certain conditions including cost burden. The users are required to take the first course and the training for each equipment.．

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Introduction of Equipment

Click here for the major research support facilities we have.

There are other devices. Please feel free to contact us.