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Registration

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Contact us for the cleanroom tour, consultation, or registration.
semi-mem"at"ofc.titech.ac.jp
Please replace "at" with "@" and send an email directly from the faculty member or staff, or CC your instructor in charge.

Click here* for the operating rules of the Mechano-Microprocess Cleanrooms.
Click here* for the flow of use.
*The linked page is written in Japanese.

●For students belonging to other institutions●
Students belonging to other institutions can also use this facility by using
the“Annual Pass System for Students of Other Universities or Institutions*”
Please feel free to contact the Semiconductors and MEMS Processing Division.
*The linked page is written in Japanese.

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The First Course

After registering for use, take the first course (initial training).
Those who have not attended the course cannot enter the room.

Items to be prepared after registration and before the first course.

・Cleanroom suits
・ Cleanroom caps
・Cleanroom shoes (Shared ones can be used)
・Gloves (powder-free ones)
・Masks
Contact the executive secretary for details.

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Equipment Course

After taking the first course, apply for the training to the person in charge of the equipment you wish to use.

≪Contact information of the person in charge of equipment≫
Phone: 045-924-XXXX (XXXX: extension number)
Please replace "at" with @ and send the e-mail.

	mail address	extension number
Divisional Director Matsutani Akihiro	matsutani.a.aa"at"m.titech.ac.jp	５０７４
Technical Staff, Sato	sato.m.ar"at"m.titech.ac.jp	５０７４
Technical Staff, Tohnishi	tohnishi.m.ab"at"m.titech.ac.jp	５０７４
Technical Staff, Fujimoto	fujimoto.m.af"at"m.titech.ac.jp	５０７４

List of persons in charge

General information about Mechano-Microprocess Cleanrooms	First course (Initial training), Consultation about experiments		Matsutani
	Executive Secretary		Sato
Mechano-Microprocess Cleanroom 1	Lithography	Mask Aligner (Mikasa)	Fujimoto
		Electron Beam Lithography Exposure (Totech)	Fujimoto
		Electron Beam Lithography Exposure (SANYU)	Fujimoto
		Maskless Exposure System	Fujimoto
	Etching / Deposition	Deep-RIE	Matsutani
		Reactive Ion Etching	Matsutani
		CCP-CVD	Tohnishi
		Sputtering Equipment (SANYU)	Sato
		Sputtering Equipment (Canon Anelva)	Sato
		Simple Evaporation System	Sato
		Electron Beam Deposition Equipment(SANYU)	Sato
		Simple Sputtering Equipment	Matsutani
	Evaluation	Scanning Electron Microscope, Au coater	Sato
		Dektak(Veeco)	Tohnishi
		Ellipsometer	Sato
	Others	Dicing Saw	Tohnishi
		Critical Point Dryer	Matsutani
Mechano-Microprocess Cleanroom2	Lithography	Mask Aligner(Kyowariken)	Fujimoto
	Etching / Deposition	Reactive Ion Etching	Tohnishi
		Electron Cyclotron Resonance Ion Shower System	Matsutani
		XeF2 Vapor-phase Etching	Matsutani
		Electron Beam Deposition Equipment (Ulvac)	Fujimoto
	Evaluation	Dektak（Bruker)	Tohnishi
		Atomic Force Microscope	Tohnishi
	Others	Anodic bonding	Tohnishi
		Other Microscopes, UV Ozone Cleaner	Contact a staff nearby before using them.

When you cannot find the equipment you want to use, contact the Semiconductors and MEMS Processing Division, semi-mem”at”ofc.titech.ac.jp
When you have any trouble dealing with equipment, be sure to contact the staff
Don't make any judgment by yourself!
Please replace "(at)" with "@" when you mail us.

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